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Aluminum Nitride Piezoelectric NEMS devices using 2-Dimensional Electrode Material

Development of graphene-AlN metamaterial narrowband and tunable IR/THz absorbers

Background

Traditional IR detectors based on semiconductor photon-detectors need cryogenic cooling, making them bulky, costly and inconvenient to use. Uncooled IR thermal detectors based on bolometric principle have been recently developed, which are much smaller, lighter, cheaper and power-efficient, making them good alternatives to semiconductor detectors. However, relatively slow response time and poor detection limit are the main obstacles for uncooled thermal detectors to rival traditional semiconductor detectors.

Nanoelectromechanical systems (NEMS) are devices that integrate electrical and mechanical functionality on the nanoscale. They are seen as the next miniaturization step from microelectromechanical systems, or MEMS devices. These systems can be used for a variety of applications, including chemical, physical, and bio-sensors, RF communications, and accelerometers. Existing NEMS systems, which have

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